TY - RPRT TI - Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing AU - Goldberg, Kenneth A. AU - Bryant, Diane AU - Wojdyla, Antoine AU - Helmbrecht, Michael AU - Gullikson, Eric PY - 2020 DO - 10.1364/ol.398737 UR - https://www.osti.gov/biblio/1695758 ID - 1695758 ER -