TY - RPRT TI - Soft sample deformation, damage and induced electromechanical property changes in contact- and tapping-mode atomic force microscopy AU - Saadi, M. R. AU - Uluutku, Berkin AU - Parvini, Cameron H. AU - Solares, Santiago D. PY - 2020 DO - 10.1088/2051-672x/abb888 UR - https://www.osti.gov/biblio/1696774 ID - 1696774 ER -