@misc{indiciae482795b07a8a,
  title = {Low Thermal Budget Gate Stack for Atomic Precision Devices.},
  author = {Anderson, Evan Michael and Schmucker, Scott William and Campbell, DeAnna Marie and Lu, Tzu-Ming and Baczewski, Andrew David and Arghavani, Reza and Ward, Daniel Robert},
  year = {2019},
  url = {https://www.osti.gov/biblio/1700542},
  note = {Source identifier: 1700542}
}