@misc{indiciaed91c6d4304f2, title = {Highly sensitive MEMS frequency modulated accelerometer with small footprint}, author = {Esteves Moreira, Eurico and Kuhlmann, Burkhard and Serra Alves, Filipe and Alves Dias, Rosana and Cabral, Jorge and Gaspar, João and Rocha, Luis Alexandre}, year = {2020}, doi = {10.1016/j.sna.2020.112005}, url = {https://www.osti.gov/biblio/1702242}, note = {Source identifier: 1702242} }