TY  - RPRT
TI  - Highly sensitive MEMS frequency modulated accelerometer with small footprint
AU  - Esteves Moreira, Eurico
AU  - Kuhlmann, Burkhard
AU  - Serra Alves, Filipe
AU  - Alves Dias, Rosana
AU  - Cabral, Jorge
AU  - Gaspar, João
AU  - Rocha, Luis Alexandre
PY  - 2020
DO  - 10.1016/j.sna.2020.112005
UR  - https://www.osti.gov/biblio/1702242
ID  - 1702242
ER  -