@misc{indiciae4511006f3b5b,
  title = {Final Scientific/Technical Report: Low-cost, low-defect, 2" GaN epi-ready substrates processed with E-grinding.},
  author = {Hashimoto, Tadao},
  year = {2020},
  url = {https://www.osti.gov/biblio/1714375},
  note = {Source identifier: 1714375}
}