@misc{indiciaebc2d2b30a7e4,
  title = {White-light interferometry for early-stage metal oxide growth characterization},
  author = {Idell, Yaakov and Au, Brian and Jaycox, Adam and Siekhaus, Wigbert and Saw, Cheng and Blobaum, Kerri and McLean II, William},
  year = {2020},
  doi = {10.1088/1361-6501/ab9129},
  url = {https://www.osti.gov/biblio/1724323},
  note = {Source identifier: 1724323}
}