TY  - RPRT
TI  - White-light interferometry for early-stage metal oxide growth characterization
AU  - Idell, Yaakov
AU  - Au, Brian
AU  - Jaycox, Adam
AU  - Siekhaus, Wigbert
AU  - Saw, Cheng
AU  - Blobaum, Kerri
AU  - McLean II, William
PY  - 2020
DO  - 10.1088/1361-6501/ab9129
UR  - https://www.osti.gov/biblio/1724323
ID  - 1724323
ER  -