TY  - RPRT
TI  - Reactive ion etched, self-aligned, selective area poly-Si/SiO 2 passivated contacts
AU  - Young, David L.
AU  - Chen, Kejun
AU  - Theingi, San
AU  - LaSalvia, Vincenzo
AU  - Diercks, David
AU  - Guthrey, Harvey
AU  - Nemeth, William
AU  - Page, Matthew
AU  - Stradins, Pauls
PY  - 2020
DO  - 10.1016/j.solmat.2020.110621
UR  - https://www.osti.gov/biblio/1726066
ID  - 1726066
ER  -