@misc{indiciae0a745adc8ac2,
  title = {Novel Techniques for Silicon Doping Profiling (U)},
  author = {Friedman, Caitlin Rochford and Montague, Stephen and Sniegowski, Jeffry Joseph},
  year = {2016},
  doi = {10.2172/1733248},
  url = {https://www.osti.gov/biblio/1733248},
  note = {Source identifier: 1733248}
}