@misc{indiciaed6c5e9642d9f,
  title = {Sputtered Au–Ta films with tunable electrical resistivity},
  author = {Bayu Aji, L. B. and Engwall, A. M. and Bae, J. H. and Baker, A. A. and Beckham, J. L. and Shin, S. J. and Lepro Chavez, X. and McCall, S. K. and Moody, J. D. and Kucheyev, S. O.},
  year = {2020},
  doi = {10.1088/1361-6463/abc501},
  url = {https://www.osti.gov/biblio/1755824},
  note = {Source identifier: 1755824}
}