@misc{indiciaecd8bc815980b,
  title = {Post-growth modulation doping by ion implantation},
  author = {Chiu, P. -Y. and Lidsky, D. and Chuang, Y. and Su, Y. -H. and Li, J. -Y. and Harris, C. T. and Lu, T. M.},
  year = {2020},
  doi = {10.1063/5.0031992},
  url = {https://www.osti.gov/biblio/1760449},
  note = {Source identifier: 1760449}
}