@misc{indiciaeab7b1ac1cb89,
  title = {Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al 2 O 3 by trimethylaluminum},
  author = {Myers, Tyler J. and Cano, Austin M. and Lancaster, Diane K. and Clancey, Joel W. and George, Steven M.},
  year = {2021},
  doi = {10.1116/6.0000680},
  url = {https://www.osti.gov/biblio/1763832},
  note = {Source identifier: 1763832}
}