TY  - RPRT
TI  - Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al 2 O 3 by trimethylaluminum
AU  - Myers, Tyler J.
AU  - Cano, Austin M.
AU  - Lancaster, Diane K.
AU  - Clancey, Joel W.
AU  - George, Steven M.
PY  - 2021
DO  - 10.1116/6.0000680
UR  - https://www.osti.gov/biblio/1763832
ID  - 1763832
ER  -