@misc{indiciaeb8fba97ec0bd,
  title = {Low-Temperature, High-Speed Processing of Oxide Dielectric Thin Films},
  author = {Hsu, Julia WP},
  year = {2021},
  doi = {10.2172/1764309},
  url = {https://www.osti.gov/biblio/1764309},
  note = {Source identifier: 1764309}
}