@misc{indiciae17739010e590, title = {Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO 4 Thin-Film Solid Electrolytes}, author = {Sheil, Ryan and Perng, Ya-Chuan and Mars, Julian and Cho, Jea and Dunn, Bruce and Toney, Michael F. and Chang, Jane P.}, year = {2020}, doi = {10.1021/acsami.0c11614}, url = {https://www.osti.gov/biblio/1767976}, note = {Source identifier: 1767976} }