@misc{indiciae38c59b1df7e2, title = {AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging}, author = {Mahdavi, Mohammad and Nikooienejad, Nastaran and Moheimani, S. Reza}, year = {2020}, doi = {10.1109/jmems.2020.3011826}, url = {https://www.osti.gov/biblio/1768377}, note = {Source identifier: 1768377} }