TY  - RPRT
TI  - AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging
AU  - Mahdavi, Mohammad
AU  - Nikooienejad, Nastaran
AU  - Moheimani, S. Reza
PY  - 2020
DO  - 10.1109/jmems.2020.3011826
UR  - https://www.osti.gov/biblio/1768377
ID  - 1768377
ER  -