@misc{indiciae0feeb26ead2b,
  title = {Development of a high-k gate stack for atomic-precision advanced manufacturing.},
  author = {Lu, Tzu-Ming and Anderson, Evan Michael and Campbell, DeAnna Marie and Marshall, Michael Thomas and Lu, Ping and Schmucker, Scott William and Tracy, Lisa A and Robison, Mitchell and Arghavani, Reza and Maurer, Leon and Baczewski, Andrew David and Ward, Daniel and Misra, Shashank},
  year = {2020},
  url = {https://www.osti.gov/biblio/1768736},
  note = {Source identifier: 1768736}
}