@misc{indiciae1d8e8efe8579,
  title = {Sub-Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal-Oxide-Semiconductor-Compatible Aluminum Electrodes},
  author = {Wang, Dixiong and Musavigharavi, Pariasadat and Zheng, Jeffrey and Esteves, Giovanni and Liu, Xiwen and Fiagbenu, Merrilyn Adzo and Stach, Eric A. and Jariwala, Deep and Olsson III, Roy H.},
  year = {2021},
  doi = {10.1002/pssr.202000575},
  url = {https://www.osti.gov/biblio/1769945},
  note = {Source identifier: 1769945}
}