TY  - RPRT
TI  - Sub-Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal-Oxide-Semiconductor-Compatible Aluminum Electrodes
AU  - Wang, Dixiong
AU  - Musavigharavi, Pariasadat
AU  - Zheng, Jeffrey
AU  - Esteves, Giovanni
AU  - Liu, Xiwen
AU  - Fiagbenu, Merrilyn Adzo
AU  - Stach, Eric A.
AU  - Jariwala, Deep
AU  - Olsson III, Roy H.
PY  - 2021
DO  - 10.1002/pssr.202000575
UR  - https://www.osti.gov/biblio/1769945
ID  - 1769945
ER  -