@misc{indiciaeb5463e411e93,
  title = {Atomic layer deposition of sodium fluoride thin films},
  author = {Kuraitis, Sara and Kang, Donghyeon and Mane, Anil U. and Zhou, Hua and Soares, Jake and Elam, Jeffrey W. and Graugnard, Elton},
  year = {2021},
  doi = {10.1116/6.0000847},
  url = {https://www.osti.gov/biblio/1770382},
  note = {Source identifier: 1770382}
}