@misc{indiciaee24ed7690b09,
  title = {FEBIP for functional nanolithography of 2D nanomaterials},
  author = {Kim, Songkil and Fedorov, Andrei G.},
  year = {2020},
  doi = {10.1088/978-0-7503-2608-7ch12},
  url = {https://www.osti.gov/biblio/1773748},
  note = {Source identifier: 1773748}
}