TY  - RPRT
TI  - FEBIP for functional nanolithography of 2D nanomaterials
AU  - Kim, Songkil
AU  - Fedorov, Andrei G.
PY  - 2020
DO  - 10.1088/978-0-7503-2608-7ch12
UR  - https://www.osti.gov/biblio/1773748
ID  - 1773748
ER  -