TY  - RPRT
TI  - Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si 3 N 4 and Si etching
AU  - Li, Chen
AU  - Godyak, Valery
AU  - Hofmann, Thorsten
AU  - Edinger, Klaus
AU  - Oehrlein, Gottlieb S.
PY  - 2020
DO  - 10.1116/1.5143537
UR  - https://www.osti.gov/biblio/1779714
ID  - 1779714
ER  -