@misc{indiciaee548d1adc8d5,
  title = {Room temperature plasma-etching and surface passivation of far-ultraviolet Al mirrors using electron beam generated plasmas},
  author = {Rodriguez de Marcos, Luis V. and Boris, David R. and Gray, Emrold and del Hoyo, Javier G. and Kozen, Alexander C. and Richardson, Joseph G. and Rosenberg, Samantha G. and Walton, Scott G. and Wheeler, Virginia and Wollack, Edward J. and Woodward, Jeffrey M. and Quijada, Manuel A.},
  year = {2021},
  doi = {10.1364/ome.417475},
  url = {https://www.osti.gov/biblio/1782567},
  note = {Source identifier: 1782567}
}