@misc{indiciaef3a7fc5ab300,
  title = {Highly efficient ultra-low blaze angle multilayer grating},
  author = {Voronov, D. L. and Park, S. and Gullikson, E. M. and Salmassi, F. and Padmore, H. A.},
  year = {2021},
  doi = {10.1364/oe.424536},
  url = {https://www.osti.gov/biblio/1782983},
  note = {Source identifier: 1782983}
}