@misc{indiciaeabbb1c45873c,
  title = {An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.},
  author = {Titze, Michael and Chandrasekaran, Vigneshwaran and Htoon, Han and Bielejec, Edward S.},
  year = {2020},
  url = {https://www.osti.gov/biblio/1783599},
  note = {Source identifier: 1783599}
}