@misc{indiciae11a4dbf6dcc4,
  title = {Hybrid MEMS-CMOS ion traps for NISQ computing},
  author = {Blain, M. G. and Haltli, R. and Maunz, P. and Nordquist, C. D. and Revelle, M. and Stick, D.},
  year = {2021},
  doi = {10.1088/2058-9565/ac01bb},
  url = {https://www.osti.gov/biblio/1787511},
  note = {Source identifier: 1787511}
}