@misc{indiciaeeac3ff174ac2,
  title = {Modified atomic layer deposition of MoS 2 thin films},
  author = {Zeng, Li and Richey, Nathaniel E. and Palm, David W. and Oh, Il-Kwon and Shi, Jingwei and Maclsaac, Callisto and Jaramillo, Thomas and Bent, Stacey F.},
  year = {2020},
  doi = {10.1116/6.0000641},
  url = {https://www.osti.gov/biblio/1798891},
  note = {Source identifier: 1798891}
}