@misc{indiciaec58b2e8f2f49,
  title = {High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair},
  author = {Mahdavi, Mohammad and Coskun, M. Bulut and Moheimani, S. Reza},
  year = {2020},
  doi = {10.1109/jmems.2020.2967794},
  url = {https://www.osti.gov/biblio/1799481},
  note = {Source identifier: 1799481}
}