TY  - RPRT
TI  - High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair
AU  - Mahdavi, Mohammad
AU  - Coskun, M. Bulut
AU  - Moheimani, S. Reza
PY  - 2020
DO  - 10.1109/jmems.2020.2967794
UR  - https://www.osti.gov/biblio/1799481
ID  - 1799481
ER  -