@misc{indiciaea0b5cbbb0cac,
  title = {Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source},
  author = {Qerimi, Dren and Panici, Gianluca and Jain, Arihant and Jacobson, Daniel and Ruzic, David N.},
  year = {2020},
  doi = {10.1116/6.0000200},
  url = {https://www.osti.gov/biblio/1800514},
  note = {Source identifier: 1800514}
}