@misc{indiciae21ecf8c19197,
  title = {Power matching to pulsed inductively coupled plasmas},
  author = {Qu, Chenhui and Lanham, Steven J. and Shannon, Steven C. and Nam, Sang Ki and Kushner, Mark J.},
  year = {2020},
  doi = {10.1063/5.0002522},
  url = {https://www.osti.gov/biblio/1802572},
  note = {Source identifier: 1802572}
}