TY  - RPRT
TI  - Power matching to pulsed inductively coupled plasmas
AU  - Qu, Chenhui
AU  - Lanham, Steven J.
AU  - Shannon, Steven C.
AU  - Nam, Sang Ki
AU  - Kushner, Mark J.
PY  - 2020
DO  - 10.1063/5.0002522
UR  - https://www.osti.gov/biblio/1802572
ID  - 1802572
ER  -