@misc{indiciae052aa7f68706,
  title = {Formation of antireflective surfaces},
  author = {Black, Charles T. and Rahman, Atikur and Eisaman, Matthew D. and Ashraf, Ahsan},
  year = {2021},
  url = {https://www.osti.gov/biblio/1805346},
  note = {Source identifier: 1805346}
}