@misc{indiciaec605272e18bd,
  title = {Planarization of optical substrates},
  author = {Stolz, Christopher J. and Folta, James A. and Mirkarimi, Paul B. and Soufli, Regina and Walton, Christopher Charles and Wolfe, Justin and Menoni, Carmen S. and Patel, Dinesh},
  year = {2021},
  url = {https://www.osti.gov/biblio/1805430},
  note = {Source identifier: 1805430}
}