@misc{indiciaef95ba22ebc51,
  title = {Method of fabricating photosensitive devices with reduced process-temperature budget},
  author = {Kay, Randolph R. and Mani, Seethambal S. and Pomerene, Andrew T. S. and Starbuck, Andrew Lea and Brock, Reinhard and Trotter, Douglas Chandler and Jones, Adam},
  year = {2021},
  url = {https://www.osti.gov/biblio/1805476},
  note = {Source identifier: 1805476}
}