TY  - RPRT
TI  - Method of fabricating photosensitive devices with reduced process-temperature budget
AU  - Kay, Randolph R.
AU  - Mani, Seethambal S.
AU  - Pomerene, Andrew T. S.
AU  - Starbuck, Andrew Lea
AU  - Brock, Reinhard
AU  - Trotter, Douglas Chandler
AU  - Jones, Adam
PY  - 2021
UR  - https://www.osti.gov/biblio/1805476
ID  - 1805476
ER  -