@misc{indiciaea4b5d4b92c26,
  title = {Wafer-based charged particle accelerator, wafer components, methods, and applications},
  author = {Lal, Amit and Schenkel, Thomas and Persaud, Arun and Ji, Qing and Seidl, Peter and Waldron, Will and Ardanuc, Serhan and Kadayra Basavarajappa, Vinaya Kumar},
  year = {2021},
  url = {https://www.osti.gov/biblio/1805487},
  note = {Source identifier: 1805487}
}