@misc{indiciaed04ab8b995f4, title = {Beam power scale-up in micro-electromechanical systems based multi-beam ion accelerators}, author = {Ji, Q. and Afridi, K. K. and Bauer, T. and Giesbrecht, G. and Hou, Y. and Lal, A. and Ni, D. and Persaud, A. and Qin, Z. and Seidl, P. and Sinha, S. and Schenkel, T.}, year = {2021}, doi = {10.1063/5.0058175}, url = {https://www.osti.gov/biblio/1807510}, note = {Source identifier: 1807510} }