@misc{indiciae3628d3470634, title = {FAIR DEAL GC Thrust 3 : CMOS Integration.}, author = {Scrymgeour, David and Leenheer, Andrew Jay and Campbell, DeAnna Marie and Anderson, Evan Michael}, year = {2020}, url = {https://www.osti.gov/biblio/1808022}, note = {Source identifier: 1808022} }