@misc{indiciae4fb756bf23f1,
  title = {Acoustic Wafer Defect Detection System},
  author = {Pantea, Cristian},
  year = {2021},
  doi = {10.2172/1813835},
  url = {https://www.osti.gov/biblio/1813835},
  note = {Source identifier: 1813835}
}