@misc{indiciaed1d789fab0c6,
  title = {RF sheath induced sputtering on Proto-MPEX. I. Sheath equivalent dielectric layer for modeling the RF sheath},
  author = {Beers, Clyde J. and Green, David L. and Lau, Cornwall and Myra, J. R. and Rapp, Juergen and Younkin, Tim R. and Zinkle, Steven J.},
  year = {2021},
  doi = {10.1063/5.0054074},
  url = {https://www.osti.gov/biblio/1820828},
  note = {Source identifier: 1820828}
}