TY  - RPRT
TI  - RF sheath induced sputtering on Proto-MPEX. I. Sheath equivalent dielectric layer for modeling the RF sheath
AU  - Beers, Clyde J.
AU  - Green, David L.
AU  - Lau, Cornwall
AU  - Myra, J. R.
AU  - Rapp, Juergen
AU  - Younkin, Tim R.
AU  - Zinkle, Steven J.
PY  - 2021
DO  - 10.1063/5.0054074
UR  - https://www.osti.gov/biblio/1820828
ID  - 1820828
ER  -