@misc{indiciaea3117c616d18,
  title = {Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data},
  author = {Li, Yifei and Wu, Yifeng and Yu, Heshan and Takeuchi, Ichiro and Jaramillo, Rafael},
  year = {2021},
  doi = {10.1002/adpr.202100147},
  url = {https://www.osti.gov/biblio/1821938},
  note = {Source identifier: 1821938}
}