TY  - RPRT
TI  - Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data
AU  - Li, Yifei
AU  - Wu, Yifeng
AU  - Yu, Heshan
AU  - Takeuchi, Ichiro
AU  - Jaramillo, Rafael
PY  - 2021
DO  - 10.1002/adpr.202100147
UR  - https://www.osti.gov/biblio/1821938
ID  - 1821938
ER  -