@misc{indiciae92a4ca870403, title = {Machine learning detection and classification of defects in STM lithography data.}, author = {Noble Hernandez, Daniel Alejandro and Ivie, Jeffrey Andrew and Kalinin, Sergei V and Ziatdinov, Maxim and Scrymgeour, David and Bussmann, Ezra and Mounce, Andrew}, year = {2020}, url = {https://www.osti.gov/biblio/1822623}, note = {Source identifier: 1822623} }