TY  - RPRT
TI  - Machine learning detection and classification of defects in STM lithography data.
AU  - Noble Hernandez, Daniel Alejandro
AU  - Ivie, Jeffrey Andrew
AU  - Kalinin, Sergei V
AU  - Ziatdinov, Maxim
AU  - Scrymgeour, David
AU  - Bussmann, Ezra
AU  - Mounce, Andrew
PY  - 2020
UR  - https://www.osti.gov/biblio/1822623
ID  - 1822623
ER  -