@misc{indiciaea82f856b1d38,
  title = {System and method for monitoring atomic absorption during a surface modification process},
  author = {Atanasoff, George and Metting, Christopher J. and Von Bredow, Hasso},
  year = {2021},
  url = {https://www.osti.gov/biblio/1823838},
  note = {Source identifier: 1823838}
}